by highvac-corporation | Feb 7, 2022 | Abatement, Custom Solutions, Semiconductor
In 2014, Highvac was requested to deliver a SAFE and RELIABLE Point of Use abatement system to a major 200mm semiconductor manufacturer for their ASM Epsilon Epitaxy tool. The customer was originally utilizing a competitive burn/wet abatement device and experiencing...
by highvac-corporation | Feb 7, 2022 | Custom Solutions
In 2013, Highvac was asked by a customer to deliver their vacuum pumps on or in non-flammable pallets or crates. We also recognized a need from other customers to make the crating process easier, more effecient, and more effective, as everybody seemed to have a...
by highvac-corporation | Feb 7, 2022 | Custom Solutions, Semiconductor
Dry Pumps are typically constructed of cast iron. Due to the corrosive environment of semiconductor processes such as Metal Etch and PECVD, the internal components become etched to the point that the pumps can no longer be effectively rebuilt. Short of replacing...
by highvac-corporation | Feb 7, 2022 | Custom Solutions, Semiconductor
Having serviced thousands of Edwards iQDP80/QMB dry pump systems, Highvac recognized and developed a solution to significantly decrease booster seal failures; a problem that eventually results in oil either leaking out between the motor plate and kinetic drive, or...
